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Impurity diffusion process for silicon semiconductors is fast and preciseImpurity diffusion process produces precision silicon semiconductor junctions economically and fast. Oxide is deposited on a silicon wafer and a controlled concentration of impurity atoms in gaseous form is simultaneously introduced into the reaction.
Document ID
19650000298
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Mc ~louski, R. M.
Mc Louski, R. M.
Skouson, G. W.
Date Acquired
August 2, 2013
Publication Date
October 1, 1965
Subject Category
Electronic Components And Circuits
Report/Patent Number
GSC-397
Report Number: GSC-397
Accession Number
65B10300
Funding Number(s)
CONTRACT_GRANT: NAS5-2755
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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