Microelectronics research on silicon-silicon oxide structures and interfaces  third quarterly report, 1 dec. 1964 - 28 feb. 1965

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Microelectronics research on silicon-silicon oxide structures and interfaces third quarterly report, 1 dec. 1964 - 28 feb. 1965

Electron microscopy calculations in minimum and maximum capacitance theories for silicon-silicon oxide structures and interfaces

Document ID

19650012159

Acquisition Source

Legacy CDMS

Document Type

Contractor Report (CR)

Date Acquired

August 2, 2013

Publication Date

February 28, 1965

Subject Category

Report/Patent Number

Accession Number

65N21760

Funding Number(s)

Distribution Limits

Public

Work of the US Gov. Public Use Permitted.

Keywords

Name

Type

STI

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NTRS