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Effect of elevated temperatures on sputtering yields.Elevated temperatures effect on sputtering yields of polycrystalline and single crystal metals, considering defect annealing and focused collision sequence
Document ID
19650040719
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Carlston, C. E.
Comeaux, A.
Magnuson, G. D.
Mahadevan, P.
Date Acquired
August 2, 2013
Publication Date
May 3, 1965
Subject Category
Physics, Solid-State
Accession Number
65A23423
Distribution Limits
Public
Copyright
Other
Keywords
TEMPERATURE EFFECT
YIELD STRENGTH
SPUTTERING
CRYSTAL STRUCTURE DEFECT
METAL CRYSTAL

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