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Electron microscope method for measuring diffraction grating groove geometry.
Electron microscope method for measuring diffraction grating groove geometry in conjunction with fiber shadowing
Document ID
19650046822
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Anderson, W. A.
Griffin, G. L.
Mooney, C. F.
Wiley, R. S.
Date Acquired
August 2, 2013
Publication Date
August 1, 1965
Subject Category
Physics, General
Accession Number
65A29526
Distribution Limits
Public
Copyright
Other
Keywords
ELECTRON MICROSCOPE
DIFFRACTION GRATING
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