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Sputtering ion source study program Final report, 29 Jan. - 15 Nov. 1962Design, construction, assembly, and operation of ion source for solids
Document ID
19660014818
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Date Acquired
August 3, 2013
Publication Date
December 15, 1962
Subject Category
Physics, Atomic, Molecular, And Nuclear
Report/Patent Number
NASA-CR-71924
GCA-TR-62-10-G
Report Number: NASA-CR-71924
Report Number: GCA-TR-62-10-G
Accession Number
66N24107
Funding Number(s)
CONTRACT_GRANT: JPL-950118
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
ION SOURCE
GAS-ION INTERACTION
SPUTTERING
MASS SPECTROMETER

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