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Sputtering ion source Final report, 29 Mar. - 30 Sep. 1963Modified sputtering ion source analyses of solids
Document ID
19660015116
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Herzog, R. F. K. (Geophysics Corp. of America Bedford, MA, United States)
Liebl, H. J. (Geophysics Corp. of America Bedford, MA, United States)
Date Acquired
August 3, 2013
Publication Date
January 1, 1963
Subject Category
Physics, Plasma
Report/Patent Number
GCA-TR-63-7-G
NASA-CR-74626
Report Number: GCA-TR-63-7-G
Report Number: NASA-CR-74626
Accession Number
66N24405
Funding Number(s)
CONTRACT_GRANT: NAS7-100
CONTRACT_GRANT: JPL-950576
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
ELECTRON BOMBARDMENT
SPUTTERING
DUOPLASMATRON
ION SOURCE

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