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Sputtering ion source study program, phase 1 Final report, 31 Jul. 1961 - 28 Jan. 1962Design of sputtering ion source for application to analysis of solids
Document ID
19660016251
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Date Acquired
August 3, 2013
Publication Date
January 28, 1962
Subject Category
Facilities, Research, And Support
Report/Patent Number
NASA-CR-74943
Report Number: NASA-CR-74943
Accession Number
66N25540
Funding Number(s)
CONTRACT_GRANT: NAS7-100
CONTRACT_GRANT: JPL-950118
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
ION SOURCE
SPUTTERING
SOLIDS

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