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Sputtering ion source study program, second phase Final report, 2 Jan. - 15 Nov. 1962Sputtering ion source for analysis of solids
Document ID
19660024150
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Date Acquired
August 3, 2013
Publication Date
December 15, 1962
Subject Category
Physics, Plasma
Report/Patent Number
NASA-CR-77051
Report Number: NASA-CR-77051
Accession Number
66N33440
Funding Number(s)
CONTRACT_GRANT: JPL-950118
CONTRACT_GRANT: NAS7-100
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
SPUTTERING
MASS SPECTROMETRY
ION SOURCE

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