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Fast scanning infrared microscope for semiconductor evaluation.Fast scanning IR microscope for semiconductor evaluation used for engineering design analysis, reliability improvement, failure analysis, etc
Document ID
19660045386
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Hamiter, L.
Vanzetti, R.
Date Acquired
August 3, 2013
Publication Date
January 1, 1966
Subject Category
Electronic Equipment
Accession Number
66A24676
Distribution Limits
Public
Copyright
Other
Keywords
INFRARED SCANNER
ELECTRONIC EQUIPMENT TESTING
MICROSCOPE

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