Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Date Acquired
August 3, 2013
Publication Date
October 1, 1966
Accession Number
66A42389
Funding Number(s)
CONTRACT_GRANT: NAS5-3758
Distribution Limits
Public
Keywords
CRYSTAL GROWTHMETAL OXIDE SEMICONDUCTOR /MOS/EPITAXIAL DEPOSITIONVOLT-AMPERE CHARACTERISTICSCAPACITANCE