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Measuring coplanarity of surfacesInterferometric technique is used to measure the coplanarity and flatness of lapped surfaces on which a high-precision mirror is to be mounted. The measurement of minute height variations of several small discrete surfaces is accomplished simultaneously.
Document ID
19670000371
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Werner, M. M.
Date Acquired
August 3, 2013
Publication Date
October 1, 1967
Subject Category
Physical Sciences
Report/Patent Number
MSC-12044
Report Number: MSC-12044
Accession Number
67B10371
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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