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Impurities and interface states in the SiO2/Si system Final reportImpurities and interface states in silicon dioxide-silicon system
Document ID
19670016616
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Kuper, A. B. (Case Inst. of Tech. Cleveland, OH, United States)
Date Acquired
August 3, 2013
Publication Date
March 1, 1967
Subject Category
Physics, Solid-State
Report/Patent Number
NASA-CR-83903
Report Number: NASA-CR-83903
Accession Number
67N25945
Funding Number(s)
CONTRACT_GRANT: NGR-36-003-067
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
IMPURITY
SILICON
SURFACE STABILITY

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