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A new thin-film apparatus for depositing induction devices and LC circuitsNew apparatus for depositing thin film electrical components and related microcircuitry
Document ID
19670022240
Acquisition Source
Legacy CDMS
Document Type
Other
Authors
Adams, G. D. (NASA Marshall Space Flight Center Huntsville, AL, United States)
Date Acquired
August 3, 2013
Publication Date
June 1, 1967
Subject Category
Electronic Equipment
Accession Number
67N31569
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
SPACECRAFT COMPONENT
MICROMINIATURIZED ELECTRONIC EQUIPMENT
VACUUM DEPOSITION
MICROCIRCUIT
THIN FILM
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