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An improved spatterproof vacuum evaporation sourceImproved spatterproof vacuum evaporation source for use in depositing thin solid films on substrate
Document ID
19670022241
Acquisition Source
Legacy CDMS
Document Type
Other
Authors
Adams, G. D. (NASA Marshall Space Flight Center Huntsville, AL, United States)
Date Acquired
August 3, 2013
Publication Date
June 1, 1967
Subject Category
Electronic Equipment
Accession Number
67N31570
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
METAL FILM
VACUUM DEPOSITION
THIN FILM
CARTRIDGE
EVAPORATION
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