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A new thin-film microcircuit deposition mechanismNew thin film microdeposition unit for operating with various combinations of substrates, masks, and evaporation sources
Document ID
19670022242
Acquisition Source
Legacy CDMS
Document Type
Other
Authors
Adams, G. D. (NASA Marshall Space Flight Center Huntsville, AL, United States)
Filip, G. L. (NASA Marshall Space Flight Center Huntsville, AL, United States)
Date Acquired
August 3, 2013
Publication Date
June 1, 1967
Subject Category
Electronic Equipment
Accession Number
67N31571
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
VACUUM DEPOSITION
MICROCIRCUIT
THIN FILM
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