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Surface effects in semiconductors due to evaporation techniquesFabrication induced surface instabilities in semiconductor devices
Document ID
19670022246
Acquisition Source
Legacy CDMS
Document Type
Other
Authors
Dargo, D. R. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Lyons, J. C. (NASA Goddard Space Flight Center Greenbelt, MD, United States)
Date Acquired
August 3, 2013
Publication Date
June 1, 1967
Subject Category
Electronic Equipment
Accession Number
67N31575
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
SEMICONDUCTOR DEVICE
SURFACE STABILITY
EVAPORATION
MANUFACTURING
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