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Recent developments in thin-film capacitorsThin film capacitor research and development - deposition of materials for capacitor dielectrics, and materials compatibility with integrated circuits
Document ID
19670022251
Acquisition Source
Legacy CDMS
Document Type
Other
Authors
Mc Grady, W. C.
Date Acquired
August 3, 2013
Publication Date
June 1, 1967
Subject Category
Electronic Equipment
Accession Number
67N31580
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
CAPACITOR
DEPOSITION
INTEGRATED CIRCUIT
MATERIAL TESTING
THIN FILM
DIELECTRIC MATERIAL
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