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Evaluation of semiconductor devices using the scanning electron microscopeScanning electron microscope for evaluating failure mechanisms in semiconductor devices, and for three-dimensional representation of biological specimens
Document ID
19670022270
Acquisition Source
Legacy CDMS
Document Type
Other
Authors
Berryman, G. (NASA Marshall Space Flight Center Huntsville, AL, United States)
Edwards, T. R. (NATL. ACAD. OF SCI.)
Date Acquired
August 3, 2013
Publication Date
June 1, 1967
Subject Category
Electronic Equipment
Accession Number
67N31599
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
FLAW DETECTION
NONDESTRUCTIVE TESTING
ELECTRON MICROSCOPE
BIOINSTRUMENTATION
SEMICONDUCTOR DEVICE
SCANNING DEVICE
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