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Fast scan infrared microscope for improving microelectronic device reliabilityFast scan infrared microscope for measuring thermal and electromechanical parameters affecting reliability of microelectronic devices
Document ID
19670022271
Acquisition Source
Legacy CDMS
Document Type
Other
Authors
Hamiter, L. C., Jr. (NASA Marshall Space Flight Center Huntsville, AL, United States)
Date Acquired
August 3, 2013
Publication Date
June 1, 1967
Subject Category
Electronic Equipment
Accession Number
67N31600
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Keywords
TEST METHOD
MICROELECTRONICS
SEMICONDUCTOR DEVICE
SCANNING DEVICE
MICROSCOPE
INFRARED SCANNER
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