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Semiconductor sensors for pressure measurement at cryogenic temperatures.Si semiconductor strain sensors and miniature pressure transducers for cryogenic pressure measurements
Document ID
19670032288
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Bowman, R.
Date Acquired
August 3, 2013
Publication Date
October 1, 1966
Subject Category
Instrumentation And Photography
Accession Number
67A11017
Funding Number(s)
CONTRACT_GRANT: NAS8-11934
Distribution Limits
Public
Copyright
Other
Keywords
SEMICONDUCTOR DEVICE
PRESSURE TRANSDUCER
SILICON
STRAIN GAUGE
CRYOGENICS

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