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Electron-beam instrumentation.Use of controlled flow of electrons for analyzing and processing integrated circuits and focused electron beam as heat source for microwelding
Document ID
19670056294
Acquisition Source
Legacy CDMS
Document Type
Book Chapter
Authors
Cline, J. E.
Date Acquired
August 3, 2013
Publication Date
January 1, 1967
Subject Category
Electronic Equipment
Accession Number
67A35023
Distribution Limits
Public
Copyright
Other
Keywords
INTEGRATED CIRCUIT
ELECTRON BEAM WELDING
HEAT SOURCE
ELECTRON BEAM

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