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Charge storage in metal-silicon nitride-silicon capacitors.Metal-silicon nitride-silicon /MNS/ capacitor charge storage variation with temperature and time
Document ID
19670060528
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Hutchins, C. L.
Lase, R. W.
Date Acquired
August 3, 2013
Publication Date
August 1, 1967
Publication Information
Publication: IEEE, PROCEEDINGS
Subject Category
Electronic Equipment
Accession Number
67A39257
Distribution Limits
Public
Copyright
Other
Keywords
TIME FUNCTION
TEMPERATURE EFFECT
SILICON NITRIDE
CAPACITOR

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