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Ion plating technique improves thin film depositionIon plating technique keeps the substrate surface clean until the film is deposited, allows extensive diffusion and chemical reaction, and joins insoluble or incompatible materials. The technique involves the deposition of ions on the substrate surface while it is being bombarded with inert gas ions.
Document ID
19680000212
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Mattox, D. M.
Date Acquired
August 4, 2013
Publication Date
June 1, 1968
Subject Category
Materials
Report/Patent Number
SAN-10006
Report Number: SAN-10006
Accession Number
68B10212
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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