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Hydrogen peroxide etching proves useful for germaniumInfluence of process variations in the etching of germanium with hydrogen peroxide has been studied, along with damage effects due to radiation. The work advances the knowledge of the etching process for germanium.
Document ID
19680000452
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Dayal, Y.
Kampwirth, R.
Primak, W.
Date Acquired
August 4, 2013
Publication Date
December 1, 1968
Subject Category
Materials
Report/Patent Number
ARG-10170
Report Number: ARG-10170
Accession Number
68B10454
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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