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Reliable method for testing gross leaks in semiconductor component packagesSimple, reliable, inexpensive method for gross-leak testing has been devised, based upon the conventional fine-leak technique. The sensitivity ranges from the detection of very large leaks down to leaks of 10 to the minus seven cc helium per sec.
Document ID
19680000518
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Altshuler, T. L.
Date Acquired
August 4, 2013
Publication Date
December 1, 1968
Subject Category
Electronic Components And Circuits
Report/Patent Number
ERC-10150
Report Number: ERC-10150
Accession Number
68B10562
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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