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Development of ion implantation techniques for microelectronicsIon implementation for microelectronics
Document ID
19680002875
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Dunlap, H. L. (Hughes Research Labs. Malibu, CA, United States)
Hunsperger, R. G. (Hughes Research Labs. Malibu, CA, United States)
Marsh, O. J. (Hughes Research Labs. Malibu, CA, United States)
Mayer, J. W. (Hughes Research Labs. Malibu, CA, United States)
Date Acquired
August 4, 2013
Publication Date
October 1, 1967
Subject Category
Physics, Solid-State
Report/Patent Number
NASA-CR-86014
Report Number: NASA-CR-86014
Accession Number
68N12344
Funding Number(s)
CONTRACT_GRANT: NAS12-124
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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