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Simultaneous determination of refractive index and thickness of very thin films by ellipsometrySimultaneous determination of refractive index and thickness of very thin films by ellipsometry
Document ID
19680007799
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Rai, R. (Pennsylvania State Univ. University Park, PA, United States)
Date Acquired
August 4, 2013
Publication Date
December 1, 1967
Subject Category
Physics, General
Report/Patent Number
NASA-CR-93174
Report Number: NASA-CR-93174
Accession Number
68N17268
Funding Number(s)
CONTRACT_GRANT: NGR-39-009-042
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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