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Differential ion pumping for vacuum depositionFeasibility of differential ion pumping concept for reducing pressure during vacuum deposition of thin films
Document ID
19680022715
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Leonard, W. F. (Southern Methodist Univ. Dallas, TX, United States)
Date Acquired
August 4, 2013
Publication Date
January 1, 1968
Subject Category
Machine Elements And Processes
Report/Patent Number
NASA-CR-95949
Report Number: NASA-CR-95949
Accession Number
68N32187
Funding Number(s)
CONTRACT_GRANT: NGR-44-007-006
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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