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Bonding large area silicon wafersDiffusion welding of large area silicon wafers without altering electrical properties of semiconductor devices in wafers
Document ID
19680023191
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Date Acquired
August 4, 2013
Publication Date
July 1, 1968
Subject Category
Machine Elements And Processes
Report/Patent Number
NASA-CR-96283
QR-4
Report Number: NASA-CR-96283
Report Number: QR-4
Accession Number
68N32663
Funding Number(s)
CONTRACT_GRANT: NAS7-100
CONTRACT_GRANT: JPL-952022
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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