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Development, construction and testing of an ultrahigh vacuum dc sputtering system Final reportDesign and performance of ultrahigh vacuum system for direct current sputtering electrodes
Document ID
19680023657
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Gould, P. (Ilikon Corp. Natick, MA, United States)
Horn, G. (Ilikon Corp. Natick, MA, United States)
Date Acquired
August 4, 2013
Publication Date
July 1, 1968
Subject Category
Facilities, Research, And Support
Report/Patent Number
NASA-CR-86092
Report Number: NASA-CR-86092
Accession Number
68N33129
Funding Number(s)
CONTRACT_GRANT: NAS12-546
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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