NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Collections About News Help Login
Back to Results
Electron microprobe techniques for failure analysis of silicon planar devices.Electron microprobe analyzer for failure analysis of silicon planar devices, discussing integrated circuit metallization
Document ID
19680046276
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Cline, J. E.
Schwartz, S.
Date Acquired
August 4, 2013
Publication Date
January 1, 1968
Publication Information
Publisher: INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS, INC.,
Subject Category
Electronic Equipment
Meeting Information
Meeting: ANNUAL RELIABILITY PHYSICS SYMPOSIUM
Location: LOS ANGELES, CA
Start Date: November 6, 1967
End Date: November 8, 1967
Sponsors: INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS
Accession Number
68A27248
Distribution Limits
Public
Copyright
Other

Available Downloads

There are no available downloads for this record.

Related Records

There are no records associated with this record.
No Preview Available