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Simultaneous and independent determination of the refractive index and the thickness of thin films by ellipsometry.Refractive and thickness indexes of thin films determined by ellipsometry
Document ID
19680046596
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Lukes, F.
Rai, R.
Srinivasan, R.
Vedam, K.
Date Acquired
August 4, 2013
Publication Date
April 1, 1968
Subject Category
Physics, Solid-State
Accession Number
68A27568
Funding Number(s)
CONTRACT_GRANT: NGR-39-009-042
Distribution Limits
Public
Copyright
Other

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