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Electron-microprobe determination of the angular distribution of sputtered aluminum atoms.Sputtered atoms angular distribution measured by collecting atoms on Cu surface and determining surface densities of thin films by electron microprobe
Document ID
19680047162
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Hasseltine, E. H.
Olson, N. T.
Smith, H. P., Jr.
Date Acquired
August 4, 2013
Publication Date
February 15, 1968
Subject Category
Physics, Atomic, Molecular, And Nuclear
Accession Number
68A28134
Distribution Limits
Public
Copyright
Other

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