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Evaporation techniques for the deposition of thin films.Evaporation techniques for thin film deposition, discussing vacuum system design
Document ID
19680062294
Acquisition Source
Legacy CDMS
Document Type
Book Chapter
Authors
Behrndt, K. H.
Date Acquired
August 4, 2013
Publication Date
January 1, 1968
Publication Information
Publisher: INTERSCIENCE PUBLISHERS, DIV. OF JOHN WILEY AND SONS, INC.
Subject Category
Machine Elements And Processes
Accession Number
68A43266
Distribution Limits
Public
Copyright
Other

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