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Concept for improved vacuum pressure measuring deviceTo measure vacuum pressures in the range of 5 times 10 to the minus 7 to 5 times 10 to the minus 16, a semiconductor resistor composed of sintered zinc oxide is used. Through the effect of surface absorbed gases on the resistance of the semiconductor material, very low pressures are measured.
Document ID
19690000413
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Medved, D. B.
Date Acquired
August 5, 2013
Publication Date
September 1, 1969
Subject Category
Physical Sciences
Report/Patent Number
MFS-20172
Report Number: MFS-20172
Accession Number
69B10421
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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