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Device failure analysis by scanning electron microscopyScanning electron microscopy for semiconductor device failure analysis
Document ID
19690006630
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Davies, I. G. (University Coll. of North Wales Bangor, United Kingdom)
Shaw, D. A. (University Coll. of North Wales Bangor, United Kingdom)
Sulway, D. V. (University Coll. of North Wales Bangor, United Kingdom)
Thornton, P. R. (University Coll. of North Wales Bangor, United Kingdom)
Wayte, R. C. (University Coll. of North Wales Bangor, United Kingdom)
Date Acquired
August 5, 2013
Publication Date
January 1, 1968
Subject Category
Instrumentation And Photography
Report/Patent Number
NASA-CR-99037
Report Number: NASA-CR-99037
Accession Number
69N15962
Funding Number(s)
CONTRACT_GRANT: NGR-52-117-001
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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