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Silicon surface passivation for devices Quarterly status reportWater contamination in thermal oxide on silicon
Document ID
19690011988
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Kuper, A. B. (Case Western Reserve Univ. Cleveland, OH, United States)
Date Acquired
August 4, 2013
Publication Date
March 1, 1969
Subject Category
Chemistry
Report/Patent Number
QSR-2
NASA-CR-100497
Report Number: QSR-2
Report Number: NASA-CR-100497
Accession Number
69N21350
Funding Number(s)
CONTRACT_GRANT: NGR-36-003-067
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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