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Polymeric films for semiconductor passivationPolymeric films for MOS-FET passivation
Document ID
19690014323
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Lee, S. M.
(North American Rockwell Corp. Anaheim, CA, United States)
Date Acquired
August 4, 2013
Publication Date
March 1, 1969
Subject Category
Materials, Nonmetallic
Report/Patent Number
NASA-CR-86139
Report Number: NASA-CR-86139
Accession Number
69N23701
Funding Number(s)
CONTRACT_GRANT: NAS12-2011
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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