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Process techniques study of integrated circuits Quarterly report no. 13Dielectric defects in oxide layers by surface irregularities, and treatment
Document ID
19690026878
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Meinhard, J. E. (Autonetics Anaheim, CA, United States)
Date Acquired
August 5, 2013
Publication Date
November 15, 1968
Subject Category
Electronic Equipment
Report/Patent Number
NASA-CR-86225
Report Number: NASA-CR-86225
Accession Number
69N36256
Funding Number(s)
CONTRACT_GRANT: NAS12-4
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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