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Methods of measurement for semiconductor materials, process control, and devices Quarterly report, 1 Apr. - 30 Jun. 1969Measurement methods for semiconductor materials, devices, fabrication, processing
Document ID
19690030374
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Bullis, W. M. (National Bureau of Standards Washington, DC, United States)
Date Acquired
August 5, 2013
Publication Date
September 1, 1969
Subject Category
Physics, Solid-State
Report/Patent Number
QPR-4
NASA-CR-106280
NBS-TN-495
Report Number: QPR-4
Report Number: NASA-CR-106280
Report Number: NBS-TN-495
Accession Number
69N39759
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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