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Differential ion pumping for vacuum deposition.Differential ion pumping for vacuum deposition of thin films
Document ID
19690039720
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Leonard, W. F.
Date Acquired
August 5, 2013
Publication Date
January 1, 1969
Subject Category
Facilities, Research, And Support
Accession Number
69A17709
Funding Number(s)
CONTRACT_GRANT: NGR-44-007-006
Distribution Limits
Public
Copyright
Other

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