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Scanning electron microscopy in device diagnostics and reliability physics.Scanning electron microscopy to study device failure and performance, discussing limitations and progress
Document ID
19690054901
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Shaw, D. A.
Sulway, D. V.
Thornton, P. R.
Date Acquired
August 5, 2013
Publication Date
April 1, 1969
Subject Category
Electronic Equipment
Meeting Information
Meeting: INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS, ANNUAL RELIABILITY OF PHYSICS SYMPOSIUM
Location: WASHINGTON, DC
Start Date: December 2, 1968
End Date: December 4, 1968
Sponsors: INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS
Accession Number
69A32890
Funding Number(s)
CONTRACT_GRANT: CP-3632/66
CONTRACT_GRANT: NGR-52-117-001
Distribution Limits
Public
Copyright
Other

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