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Scanning electron mirror microscopy and scanning electron microscopy of integrated circuits.Scanning electron mirror microscope advantages over electron mirror and scanning electron microscopes for examining integrated circuits
Document ID
19690054902
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Cline, J. E.
Morris, J. M.
Schwartz, S.
Date Acquired
August 5, 2013
Publication Date
April 1, 1969
Subject Category
Instrumentation And Photography
Meeting Information
Meeting: INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS, ANNUAL RELIABILITY OF PHYSICS SYMPOSIUM
Location: WASHINGTON, DC
Start Date: December 2, 1968
End Date: December 4, 1968
Sponsors: INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS
Accession Number
69A32891
Distribution Limits
Public
Copyright
Other

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