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Current status of scanning electron microscopy in semiconductor device reliability physics.Scanning electron microscopy for reliability studies in semiconductor devices
Document ID
19690057799
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Anstead, R. J.
Floyd, S. R.
Date Acquired
August 5, 2013
Publication Date
January 1, 1969
Publication Information
Publisher: INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS, INC.,
Subject Category
Physics, Solid-State
Meeting Information
Meeting: INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS, ANNUAL SEMINAR ON FAILURE ANALYSIS
Location: PHILDELPHIA, PA
Start Date: May 22, 1969
Sponsors: INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS
Accession Number
69A35788
Distribution Limits
Public
Copyright
Other

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