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Metallization systems for silicon integrated circuits.Si integrated circuits single and composite layered metallization systems, comparing characteristics of various refractory and noble metals
Document ID
19690064772
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Terry, L. E.
Wilson, R. W.
Date Acquired
August 5, 2013
Publication Date
September 1, 1969
Subject Category
Electronic Equipment
Accession Number
69A42761
Funding Number(s)
CONTRACT_GRANT: NAS12-132
Distribution Limits
Public
Copyright
Other

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