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Development of ion implantation techniques for microelectronicsIon implantation techniques for p-n junction diodes of silicon carbide and gallium arsenide
Document ID
19700008009
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Dunlap, H. L. (Hughes Research Labs. Malibu, CA, United States)
Hunsperger, R. G. (Hughes Research Labs. Malibu, CA, United States)
Marsh, O. J. (Hughes Research Labs. Malibu, CA, United States)
Date Acquired
August 6, 2013
Publication Date
October 1, 1969
Subject Category
Electronic Equipment
Report/Patent Number
NASA-CR-107875
Report Number: NASA-CR-107875
Accession Number
70N17314
Funding Number(s)
CONTRACT_GRANT: NAS12-124
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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