NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Collections About News Help Login

Press Enter or click the Search button to begin your search.

Back to Results
Process manual for pyrolitic silicon nitride depositionPyrolytic deposition of silicon nitride films on silicon substrates for use as gate dielectric of metal oxide semiconductors
Document ID
19700014594
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Date Acquired
August 5, 2013
Publication Date
January 1, 1970
Subject Category
Physics, Solid-State
Report/Patent Number
NASA-CR-108332
HS-51431
Report Number: NASA-CR-108332
Report Number: HS-51431
Accession Number
70N23899
Funding Number(s)
CONTRACT_GRANT: NAS9-6636
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

Related Records

There are no records associated with this record.
No Preview Available