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Some practical aspects of scribingDiamond scribing methods of separating semiconductor devices on silicon wafers
Document ID
19700018359
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Technical Note (TN)
Authors
Polcari, S. M. (NASA Electronics Research Center Cambridge, MA, United States)
Date Acquired
September 2, 2013
Publication Date
May 1, 1970
Subject Category
Machine Elements And Processes
Report/Patent Number
NASA-TN-D-5811
C-116
Report Number: NASA-TN-D-5811
Report Number: C-116
Accession Number
70N27669
Funding Number(s)
CONTRACT_GRANT: 125-25-08-12
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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