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Metallization systems for integrated circuitsMetallization systems for integrated circuits
Document ID
19700023327
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Technical Note (TN)
Authors
Beatty, R. P. (NASA Electronics Research Center Cambridge, MA, United States)
Date Acquired
September 2, 2013
Publication Date
July 1, 1970
Subject Category
Electronic Equipment
Report/Patent Number
C-112
NASA-TN-D-5866
Report Number: C-112
Report Number: NASA-TN-D-5866
Accession Number
70N32638
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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