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Apollo communication systems support. Task 8b-RF sputtering system, task 8c-high ohms/square resistive films Final reportRF sputtering system and techniques for sputtering high ohms/square resistive films to form thin film resistors used in Apollo communication systems
Document ID
19700032072
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Date Acquired
August 5, 2013
Publication Date
August 1, 1970
Subject Category
Machine Elements And Processes
Report/Patent Number
NASA-CR-108610
Report Number: NASA-CR-108610
Accession Number
70N41388
Funding Number(s)
CONTRACT_GRANT: NAS9-6636
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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